Plasma characteristics of a rf ion source are investigated by emission spectroscopy . the spatiotemporal spectral line intensities of the first three atomic lines in hydrogen bahner series ( = 656 . 28 , 486 . 13 , 434 . 05nm ) of rf ion source plasma , are measured with calibrated optical multichannel analyzer ( oma ) . some plasma parameters , including electron temperature , hydrogen atom density and hydrogen ion density , are calculated and analyzed using partial local thermodynamic equilibrium ( plte ) theory and abel transform 實驗采用絕對定標(biāo)后的光學(xué)多道分析系統(tǒng)( oma )測定了離子源等離子體不同時間和空間位置的氫原子巴耳末譜線系中前三條譜線( = 656 . 28 , 486 . 13 , 434 . 05nm )的強度,并采用plte的理論和abel變換方法,計算出了高頻離子源等離子體的電子溫度、氫原子濃度、氫離子濃度等參數(shù)在放電的不同階段和徑向分布情況,并進行了簡要分析。